Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

Lauri Lipiäinen, Antti Jaakkola, Kimmo Kokkonen, Matti Kaivola
  • Applied Physics Letters, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3673558
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The following have contributed to this page: Kimmo Kokkonen