Estimation of electron temperature and density of the decay plasma in a laser-assisted discharge plasma extreme ultraviolet source by using a modified Stark broadening method

Qiushi Zhu, Takahiro Muto, Junzaburo Yamada, Nozomu Kishi, Masato Watanabe, Akitoshi Okino, Kazuhiko Horioka, Eiki Hotta
  • Journal of Applied Physics, December 2011, American Institute of Physics
  • DOI: 10.1063/1.3672816
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The following have contributed to this page: Dr Akitoshi Okino