Calibrated nanoscale dopant profiling using a scanning microwave microscope

H. P. Huber, I. Humer, M. Hochleitner, M. Fenner, M. Moertelmaier, C. Rankl, A. Imtiaz, T. M. Wallis, H. Tanbakuchi, P. Hinterdorfer, P. Kabos, J. Smoliner, J. J. Kopanski, F. Kienberger
  • Journal of Applied Physics, January 2012, American Institute of Physics
  • DOI: 10.1063/1.3672445