Fabrication of sub-10 nm gap arrays over large areas for plasmonic sensors

  • T. Siegfried, Y. Ekinci, H. H. Solak, O. J. F. Martin, H. Sigg
  • Applied Physics Letters, December 2011, American Institute of Physics
  • DOI: 10.1063/1.3672045

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http://dx.doi.org/10.1063/1.3672045

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