Molecular dynamics studies of the bonding properties of amorphous silicon nitride coatings on crystalline silicon

Keith T. Butler, Machteld P. W. E. Lamers, Arthur W. Weeber, John H. Harding
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3670068
The author haven't yet claimed this publicationThe author haven't yet claimed this publication