Impact of firing on surface passivation of p-Si by SiO2/Al and SiO2/SiNx/Al stacks

J. Chen, E. Cornagliotti, X. Loozen, E. Simoen, J. Vanhellemont, J. Lauwaert, H. Vrielinck, J. Poortmans
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3669405
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