GaAs nanostructuring by self-organized stencil mask ion lithography

Z. Q. Zhang, D. Chiappe, A. Toma, C. Boragno, J. D. Guo, E. G. Wang, F. Buatier de Mongeot
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3665693
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