Thermally oxidized formation of new Ge dots over as-grown Ge dots in the Si capping layer

Tian-Xiao Nie, Jin-Hui Lin, Zhi-Gang Chen, Yuan-Min Shao, Yue-Qin Wu, Xin-Ju Yang, Yong-Liang Fan, Zui-Min Jiang, Jin Zou
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3665398
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