Thermal diffusion of nitrogen into ZnO film deposited on InN∕sapphire substrate by metal organic chemical vapor deposition

K. Shi, P. F. Zhang, H. Y. Wei, C. M. Jiao, P. Jin, X. L. Liu, S. Y. Yang, Q. S. Zhu, Z. G. Wang
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3665203