Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

E. Abdel-Fattah, M. Bazavan, H. Sugai
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3664858
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The following have contributed to this page: Essam Abdel-Fattah