Investigation on interface related charge trap and loss characteristics of high-k based trapping structures by electrostatic force microscopy

Chenxin Zhu, Zhongguang Xu, Zongliang Huo, Rong Yang, Zhiwei Zheng, Yanxiang Cui, Jing Liu, Yumei Wang, Dongxia Shi, Guangyu Zhang, Fanghua Li, Ming Liu
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3664222