Interface trap density metrology from sub-threshold transport in highly scaled undoped Si n-FinFETs

Abhijeet Paul, Giuseppe C. Tettamanzi, Sunhee Lee, Saumitra R. Mehrotra, Nadine Collaert, Serge Biesemans, Sven Rogge, Gerhard Klimeck
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3660697
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The following have contributed to this page: Dr Giuseppe Carlo Tettamanzi