Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing

B. Haberl, S. N. Bogle, T. Li, I. McKerracher, S. Ruffell, P. Munroe, J. S. Williams, J. R. Abelson, J. E. Bradby
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3658628