Low-damage milling of an amino acid thin film with cluster ion beam

Yasuyuki Yamamoto, Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo, Masaki Hada, Sachi Ibuki, Yusaku Hontani
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3658220