Viscosity sensor using ZnO and AlN thin film bulk acoustic resonators with tilted polar c-axis orientations

Lifeng Qin, Qingming Chen, Hongbin Cheng, Qian Chen, Jing-Feng Li, Qing-Ming Wang
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3657781