Oxygen-enhanced wet thermal oxidation of GaAs

J. F. Bauters, R. E. Fenlon, C. S. Seibert, W. Yuan, J. S. B. Plunkett, J. Li, D. C. Hall
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3647579
The author haven't yet claimed this publicationThe author haven't yet claimed this publication