Defect detection in nano-scale transistors based on radio-frequency reflectometry

  • B. J. Villis, A. O. Orlov, X. Jehl, G. L. Snider, P. Fay, M. Sanquer
  • Applied Physics Letters, October 2011, American Institute of Physics
  • DOI: 10.1063/1.3647555

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http://dx.doi.org/10.1063/1.3647555

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