Schottky barrier height tuning of silicides on p-type Si (100) by aluminum implantation and pulsed excimer laser anneal

Shao-Ming Koh, Xincai Wang, Thirumal Thanigaivelan, Todd Henry, Yuri Erokhin, Ganesh S. Samudra, Yee-Chia Yeo
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3645018
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