Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering

Yukio Takahashi, Akihiro Suzuki, Nobuyuki Zettsu, Yoshiki Kohmura, Kazuto Yamauchi, Tetsuya Ishikawa
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3644396
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