Enhancement of nanovoid formation in annealed amorphous Al2O3 including W

R. Nakamura, M. Ishimaru, A. Hirata, K. Sato, M. Tane, H. Kimizuka, T. Shudo, T. J. Konno, H. Nakajima
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3639290