Kinetics of large B clusters in crystalline and preamorphized silicon

Maria Aboy, Lourdes Pelaz, Elena Bruno, Salvo Mirabella, Simona Boninelli
  • Journal of Applied Physics, October 2011, American Institute of Physics
  • DOI: 10.1063/1.3639280
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The following have contributed to this page: Simona Boninelli