Structural analysis and electrical properties of pure Ge3N4 dielectric layers formed by an atmospheric-pressure nitrogen plasma

Ryoma Hayakawa, Masashi Yoshida, Kouta Ide, Yoshiyuki Yamashita, Hideki Yoshikawa, Keisuke Kobayashi, Shunsuke Kunugi, Tsuyoshi Uehara, Norifumi Fujimura
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3638133
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