Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

Ayumi Ando, Tomoko Kurose, Vivien Reymond, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3633488
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