Reactive molecular dynamics simulation of early stage of dry oxidation of Si (100) surface

Mauludi Ariesto Pamungkas, Minwoong Joe, Byung-Hyun Kim, Kwang-Ryeol Lee
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3632968
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The following have contributed to this page: DR Mauludi Ariesto Pamungkas