Electromechanical properties of Al0.9Sc0.1N thin films evaluated at 2.5 GHz film bulk acoustic resonators

Ramin Matloub, Alvaro Artieda, Cosmin Sandu, Evgeny Milyutin, Paul Muralt
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3629773