Modelling and Simulation of the Advanced Plasma SourceBenjamin Schroeder, Ralf Peter, Jens Harhausen, Andreas Ohl
- Journal of Applied Physics, January 2011, American Institute of Physics
- DOI: 10.1063/1.3626806
Modelling and Simulation of the Advanced Plasma Source
What is it about?
A mathematical model for the expansion of a plasma beam at low pressures that can be used to describe several technical applications.
Why is it important?
The analytical description of the plasma beam which seperates ions into two components (high and low energy) is a unique way to describe e.g. (plasma) ion-assisted deposition (PIAD/IAD) processes and has been validated experimentally for Leybold's Advanced Plasma Source. It may also be useful for the description of the plume of electric propulsion systems such as ion thrusters.