Control of N/N2 species ratio in NO plasma for p-type doping of ZnO

Xingyou Chen, Zhenzhong Zhang, Bin Yao, Mingming Jiang, Shuangpeng Wang, Binghui Li, Chongxin Shan, Lei Liu, Dongxu Zhao, Dezhen Shen
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3626069