Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices

Shaoren Deng, Qi Xie, Davy Deduytsche, Marc Schaekers, Dennis Lin, Matty Caymax, Annelies Delabie, Sven Van den Berghe, Xinping Qu, Christophe Detavernier
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3622649