Characterization and modeling of structural properties of SiGe/Si superlattices upon annealing

M. Py, J. P. Barnes, P. Rivallin, A. Pakfar, T. Denneulin, D. Cooper, J. M. Hartmann
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3622622