Silicon structuring by etching with liquid chlorine and fluorine precursors using femtosecond laser pulses

C. Radu, S. Simion, M. Zamfirescu, M. Ulmeanu, M. Enculescu, M. Radoiu
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3619856