Modulation of atomic-layer-deposited Al2O3film passivation of silicon surface by rapid thermal processing

  • Dong Lei, Xuegong Yu, Lihui Song, Xin Gu, Genhu Li, Deren Yang
  • Applied Physics Letters, August 2011, American Institute of Physics
  • DOI: 10.1063/1.3616145

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http://dx.doi.org/10.1063/1.3616145

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