Role of heavy ion co-implantation and thermal spikes on the development of dislocation loops in nanoengineered silicon light emitting diodes

M. Milosavljević, M. A. Lourenço, R. M. Gwilliam, K. P. Homewood
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3614036
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