Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen

  • M. Zaka-ul-Islam, K. Niemi, T. Gans, D. O'Connell
  • Applied Physics Letters, July 2011, American Institute of Physics
  • DOI: 10.1063/1.3612914

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http://dx.doi.org/10.1063/1.3612914

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