Modeling stress retarded self-limiting oxidation of suspended silicon nanowires for the development of silicon nanowire-based nanodevices

Pier-Francesco Fazzini, Caroline Bonafos, Alain Claverie, Alexandre Hubert, Thomas Ernst, Marc Respaud
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3611420
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