Plasma-oxidation of Ge(100) surfaces using dielectric barrier discharge investigated by metastable induced electron spectroscopy, ultraviolet photoelectron spectroscopy, and x-ray photoelectron spectroscopy

L. Wegewitz, S. Dahle, O. Höfft, F. Voigts, W. Viöl, F. Endres, W. Maus-Friedrichs
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3611416
The author haven't yet claimed this publicationThe author haven't yet claimed this publication