Influence of microstructure and composition on hydrogenated silicon thin film properties for uncooled microbolometer applications

D. B. Saint John, H.-B. Shin, M.-Y. Lee, S. K. Ajmera, A. J. Syllaios, E. C. Dickey, T. N. Jackson, N. J. Podraza
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3610422