Improvement in the leakage current characteristic of metal-insulator-metal capacitor by adopting RuO2 film as bottom electrode

Jeong Hwan Han, Sora Han, Woongkyu Lee, Sang Woon Lee, Seong Keun Kim, Julien Gatineau, Christian Dussarrat, Cheol Seong Hwang
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3609875