Non-invasive nano-imaging of ion implanted and activated copper in silicon

Fouad Ballout, Jean-Sébastien Samson, Diedrich A. Schmidt, Erik Bründermann, Yves-Laurent Mathis, Biliana Gasharova, Andreas Dirk Wieck, Martina Havenith
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3606415
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