Toward a better understanding of the nanoscale degradation mechanisms of ultra-thin Si02∕Si films: Investigation of the best experimental conditions with a conductive-atomic force microscope

R. Arinero, W. Hourani, A. D. Touboul, B. Gautier, M. Ramonda, D. Albertini, L. Militaru, Y. Gonzalez-Velo, C. Guasch, F. Saigné
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3603037
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The following have contributed to this page: Dr Wael Hourani and Professor Filip Ilie