In situ synchrotron based x-ray fluorescence and scattering measurements during atomic layer deposition: Initial growth of HfO[sub 2] on Si and Ge substrates

K. Devloo-Casier, J. Dendooven, K. F. Ludwig, G. Lekens, J. D’Haen, C. Detavernier
  • Applied Physics Letters, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3598433