Modulation periodicity dependent structure, stress, and hardness in NbN/W2N nanostructured multilayer films

M. Wen, H. W. Tian, C. Q. Hu, Y. Zeng, Q. N. Meng, K. Zhang, W. T. Zheng, T. An, G. T. Zou
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3598083
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