Secondary electron dopant contrast imaging of compound semiconductor junctions

Suk Chung, Virginia Wheeler, Rachael Myers-Ward, Luke O. Nyakiti, Charles R. Eddy, D. Kurt Gaskill, Marek Skowronski, Yoosuf N. Picard
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3597785
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