Surface damage on diamond membranes fabricated by ion implantation and lift-off

  • V. S. Drumm, A. D. C. Alves, B. A. Fairchild, K. Ganesan, J. C. McCallum, D. N. Jamieson, S. Prawer, S. Rubanov, R. Kalish, L. C. Feldman
  • Applied Physics Letters, June 2011, American Institute of Physics
  • DOI: 10.1063/1.3597223

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