Epitaxial graphene surface preparation for atomic layer deposition of Al2O3

N. Y. Garces, V. D. Wheeler, J. K. Hite, G. G. Jernigan, J. L. Tedesco, Neeraj Nepal, C. R. Eddy, D. K. Gaskill
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3596761