Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes

Feng Zhang, Ya-Chuan Perng, Ju H. Choi, Tao Wu, Tien-Kan Chung, Gregory P. Carman, Christopher Locke, Sylvia Thomas, Stephen E. Saddow, Jane P. Chang
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3596574