Defect states in epitaxial HfO2 films induced by atomic transport from n-GaAs (100) substrate

C. Y. Kim, K. S. Jeong, Y. S. Kang, S. W. Cho, M.-H. Cho, K. B. Chung, D.-H. Ko, Y. Yi, H. Kim
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3596521