Er3+ and Si luminescence of atomic layer deposited Er-doped Al2O3 thin films on Si(100)

G. Dingemans, A. Clark, J. A. van Delft, M. C. M. van de Sanden, W. M. M. Kessels
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3595691