Fluorine effect on As diffusion in Ge

G. Impellizzeri, S. Boninelli, F. Priolo, E. Napolitani, C. Spinella, A. Chroneos, H. Bracht
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3592962
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The following have contributed to this page: Simona Boninelli