Influence of radio frequency power on thermal diffusivity of plasma enhanced chemical vapor deposition-grown hydrogenated amorphous carbon thin-films

Yun Young Kim, Hasan Adli Alwi, Rozidawati Awang, Sridhar Krishnaswamy
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3592291