Device quality Sb-based compound semiconductor surface: A comparative study of chemical cleaning

Aneesh Nainani, Yun Sun, Toshifumi Irisawa, Ze Yuan, Masaharu Kobayashi, Piero Pianetta, Brian. R. Bennett, J. Brad Boos, Krishna C. Saraswat
  • Journal of Applied Physics, January 2011, American Institute of Physics
  • DOI: 10.1063/1.3590167
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